旭昇科技
產品買賣
關鍵零組件耗材銷售
機台
01
AMAT 200mm
- Centura ll DPS+Metal
- Centura ll eMax
- SuperE
- Centura HDP Ultima
- Centura RTP XE+
- Endura Alcu
02
AMAT 300mm
- RTP
- HDP UltimaX
- Endura ll Co
- Endura ll MOCVD
- Endura ll Alcu
Parts
產品名稱:
SMIF INDEXER2200
Application:AMATProducer
產品名稱:
AMAT 300mmCeramic heater
Application:CVD/PVD
產品名稱:
Hot pack/Endpoint PC
Application:ETCH
產品名稱:
200mm AMAT & LAM E CHUCK
Application:ETCH/CVD
產品名稱:
200/300mm VHP Robot
Application:ETCH/CVD
產品名稱:
VHP ROBOT (PPS PN: 1201-0005)
Include:Hub, Bearing, Motor, Cable
NOT Include:Driver

產品名稱:
Top Plate
原廠序號:0041-79520/0040-92487

產品名稱:
Flowable SH(六角)
原廠序號:0041-75207

產品名稱:
RF Electorde
原廠序號:0041-94088/0040-92503

產品名稱:
FACEPLATE, LOWK XTRA ROW EXTENDING FLO
原廠序號:0021-42136

產品名稱:
TEOS High Dep Rate 300MM PRO
原廠序號:0040-95475

產品名稱:
Blocker Plate
原廠序號:0021-18725
BSV( Bonded Slit Valve) Picture

61263/ 61283/ 61300
- Process: Endura Sputter PVD 300mm
- Surface Treatment: Anodized/ Roughness condition
- Rubber: 2210; 4211

61284/ 61192
- Process: HDPCVD
- Surface Treatment: Anodized/ Roughness condition
- Rubber: 1283; 7210; 1273 7210; 1296; 0272; 1283A

62010
- Process: PECVD
- Description: Pendulum valve
- Surface Treatment: Anodized/ Roughness condition
- Rubber: 1300; 1270

61271
- Process: Sputter PVD
- Surface Treatment: ST polished
- Rubber: 2210; 4211

62860/ 62880
- Process: PEVCD 300mm/ 200mm (Process/Load Lock)
- Tool Name: NVLS Innova/ Sequa/ Altus
- Surface Treatment: Anodized/ Roughness condition
- Rubber: back 2218; 4212 front 2210; 4211

62865-002/ 62865-02
- Process: Dry Etch 300mm/ PECVD 200mm/ 300mm
- Tool Name: / AMAT Producer Process/ LL slit valve door
- Surface Treatment: HAA/ Anodized
- Rubber: 1283; 7210; 1272

61285
- Process: Dry Process Etch
- Surface Treatment: Anodized/ Roughness condition/ PTFE coated
- Rubber: 2218; 4212

61280
- Process: Dry PECVD 300mm
- Tool Name: ASM Dragon
- Surface Treatment: Anodized/ Roughness condition
- Rubber: 1280; 7210

61180
- Process: Dry Etch
- Surface Treatment: HAA
- Rubber: 7210; 1296; 1272

62840
- Process: PECVD 150mm/ 200mm
- Tool Name: AMAT P5000/ NVLS Concept One
- Surface Treatment: HAA
- Rubber: 1283; 7210; 1272 7210; 1296; 0272;

61217
- Process: RTA 300mm( Process Chamber)
- Surface Treatment: ST polished
- Rubber: 1272; 9310

61157
- Process: PECVD
- Tool Name: ASM Eagle 10
- Surface Treatment: Anodized
- Rubber: 1273
Formed O-ring Overview

301123 TEL Certas

301128 TEL Certas

301112 P5000

21629 TFT 5.5 G door seal

301136 Ebara plating

301136 Ebara plating

21223 Lam ESC

21222A Lam 9600 Door Seal

301117 Mattson Robot Pad

21212 TEL SCCM

21123 TEL Vigus

21123 TEL Vigus
Facility
01
Polymer location check
02
Install metal plate & polymer
03
Spray 脫糢劑
04
Processing molding
05
Vacuum system
Measurement
- Rubber profile dimension and hardness check to make sure perfect compression ratio.
- Metal plate dimension check.
- Surface treatment: roughness & anodized thickness



Special Plastic-- UnFilled
PEEK UNFILLED
Polyetheretherketone (PEEK) – TECAPEEK natural is a high performance, high temperature, semi crystalline thermoplastic manufactured by Ensinger using Victrex® PEEK 450G polymer. The most well known and important member of the polyaryletherketone(PAEK) group combines excellent wear, and very good mechanical properties, even under thermal load. Outstanding chemical resistance
and a high operating temperature (up to 260°C) round out its profile, and make TECAPEEK an almost universally appropriate material for highly stressed parts. Its excellent dimensional stability combined with high creep stability, supports the suitability of PEEK for the most sophisticated machined parts.











